Small-Angle X-ray Scattering(SAXS)


 Small-angle X-ray scattering (SAXS) for the measurement of particle size and membrane thickness


 In SAXS, extremely low-angle X-rays scattered from a sample are detected, enabling the measurement of membrane thicknesses and particle sizes of the order of nanometers.
 In our measurement device, which uses the MIRRORCLE-CV series synchrotron light source, characteristic X-rays can be produced by interchanging the target.




Analysis example :


Mo target with Mo-Kα radiation (17.48 keV)
 (Left) Reflectivity measurement of a vapor-deposited aluminum film (78.2 nm)
 (Right) Reflectivity measurement of silicone






Analysis example : particle size determination of gold microparticles






Analysis setup : SAXS beam line






Light source MIRRORCLE-CV1
X-ray energy 10〜25keV

Measurement method


Angular dispersion or energy dispersion

Optical system Triple-slit optical system
Sample configuration (film thickness measurement) Film deposited onto a matrix by vaporization or other means
Sample configuration (particulate) Powder
Sample size Contact us
Mesurement renge

Tens of nm〜

Hundreds of nm









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