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EUV LithographyMIRRORCLE-20ST

MIRRORCLE-20ST light source is a specially configured model for the generation of soft X-rays and extreme ultraviolet light. MIRRORCLE-20ST uses transition radiation (TR) to meet the requirements for various types of lithography such as deep edge lithography for LIGA micro-fabrication, X-ray lithography (XRL), and is an excellent candidate as a next generation light source for semiconductor EUV lithography.

Beam current in MIRRORCLE MIRRORCLE is in the order of several amperes. This compares favorably to other electron generators such as a LINAC where the beam current is a relatively low 1-100 μA. MIRRORCLE MIRRORCLE are circular machines with a high yield due to orbiting electrons being able to hit the target multiple times. MIRRORCLE-20ST is projected to generate approximately 100mW of power over 1 square inch in an inherently simplified beamline configuration.

Refalence:　 D. Minkov, M. Morita, H. Nihira, and H. Yamada; “Targets Emitting Transition Radiation for Performing X-ray Lithography by the Tabletop 　Synchrotron MIRRORCLE-20SX”; Nucl. Instr. Meth. Phys. Res. A, 590(2008)110-1134

20MeV Model Specifications

MIRRORCLE type:

20ST
 Electrons circular machine Acceleration cavity
 Magnet diameter Permanent
 Magnet diameter 80 cm
 Electron orbit radius 15 cm
N-value 0.72
 Injection method A half integer resonance
 Klystron power 10 kW
 Harmonics 8
 Weight 2.0 t
 Beam lifetime (When no target, at April, 2007) 60 sec
 Injector type MICROTRON
RF Frequency 2.45 GHz
RF Source 5 MW pulse klystron
 Peak current (MAX 100 mA
 Injection repetition rate (MAX) 400 Hz
Gate width for peak current 0.1 μs
Total size (WDH) 130 cm Φ
Weight 1.75 t
Energy range EUV
Emission scheme Bremsstralung radiation
Radiation angle

20 mrad horizontaly

<1.5 mrad vertically

Brilliance
[photons/s/mrad2/mm2/0.1%λ]

 2.3×1016(λ=13.5nm)
Maximum input power 200 (kVA)
Total size (without beamline) W 210 x D 450 x H 143 cm
Total size (with beamline) 10 m x 10 m

Weight without beamline

 3.75 t
Radiation shielding
Including（Radiation shieldingWeight140 t）
Control system Automatic standby and operation. Remote monitoring and diagnosis. Emergency shutdown system.

*1 MIRRORCLE's X-ray power very much depends on the vacuum level and is expected to improve over time.
MIRRORCLE20STと MIRRORCLE20SX are made-to-order Please contact i@photon-production.co.jp

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