Photon Production Laboratory manufactures two 20 MeV MIRRORCLE RAY sources to meet the wide array of applications requiring higher power levels than our more compact models. MIRRORCLE RAY 20ST has up to 4 beamlines and is capable of protein crystallography and advanced analysis. The second product, MIRRORCLE RAY 20SX, is a vertically oriented synchrotron designed specifically for EUV lithography.

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MIRRORCLE RAY 20SX

One of MIRRORCLE RAY 20SX objectives was to meet the requirements of semiconductor industry for X-ray lithography. The next stage in producing smaller integrated circuits is the evolution from extreme UV to X-rays. However many X-ray sources do not have the capability to meet this demanding high power application. This is not the case with MIRRORCLE RAY 20SX which can deliver the required power over a 25mm x 25mm area.


MIRRORCLE RAY 20SX has a vertical beam design for easy integration into a semiconductor fabrication facility. In the above pictured setup, an X-Y wafer stage provides precise positioning without vibration. This machine is has been commissioned at the Ohmi MIRRORCLE center in Ritto-city, Shiga.

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MIRRORCLE RAY 20ST

(Brochures are available here.)

Introducing MIRRORCLE RAY 20ST, the compact synchrotron made specifically for materials analysis and protein crystallography. This ready to use model incorporates a 20 MeV synchrotron, up to 4 beamlines, and radiation shielding in an integrated package. The figure 1 shows standard configuration, and 4 customizable beamlines.

Fig. 1 MIRRORCLE RAY 20 MeV model and beamlines. (MIRRORCLE RAY 20ST)

MIRRORCLE RAY 20ST has advantages of energy tunability and emitting white or monochromatic X-ray over a wide range. It makes it possible to perform advanced material analysis and protein crystallography in your laboratory, factory or university. For example, MIRRORCLE RAY 20ST enables MAD (Multi-wavelength Anomalous Diffraction) method and XAFS (X-ray Absorption Fine Structure) analysis. And the beamlines can be used at the same time. The features of MIRRORCLE RAY 20ST are listed below.

1. High brilliance X-ray: MIRRORCLE RAY 20ST radiates High brilliance X-ray, it say 10¹⁴ (photons/sec/mrad²/mm²/0.1%λ). This indicates higher brilliance than high power rotate anode tube.
2. The beamlines can be used at the same time: You can use the beamlines up to 4 at the same time. Integrated, compact, and powerful design providing beamlines for extended capability and flexibility in experimental setup. In some instances, simultaneous beamline operation allows for a further increase in experiment throughput. MIRRORCLE RAY 20ST incorporates a flexible modular design that is amenable to modification according to customer requirements.
3. The low background X-ray: There is a unique double crystal monochromator which the method (B) introduces in the previous page. The first crystal also serves as the target for the circulating electrons in the synchrotron. The photon density is higher than the beamline using bremsstrahlung radiation. The bremsstrahlung radiation including high energy X-ray is greatly attenuated in the machine room. Thus the resulting background radiation is low, and meets an essential requirement for advanced analysis.
4. Energy tunable: X-ray energy is tunable through interchangeable crystal targets and rotating in target position/geometry.
5. Minimum radiation shields: Self contained design including integral radiation shielding that is ready for installation in a laboratory or industrial facility. MIRRORCLE RAY 20ST can be put into 10 m x 10 m space, and requires a 2 t/m2 weight capacity as same as limits of a typical factory. We make up MIRRORCLE RAY 20ST low cost machine by reducing excess radiation shields and using standard design. Concrete shielding brocks are on wheels, and are movable for maintenance of the machine and beamlines. Additional shielding per beamline is required as is typical of any other synchrotron facility.
6. Low operating cost: This machine uses 200kVA during normal operation while X-rays are being emitted. X-ray is turned on/off easily by switching. The machine needs electron gun maintenance only and thus has a low operating cost.

Figure 2 shows the second monochromator chamber (upright) for MIRRORCLE RAY 20SX. This system is placed in the Omi MIRRORCLE Center in Ritto-city in Japan. MIRRORCLE RAY 20SX was successfully commissioned, and is producing bright X-rays. There is a CCD detector and goniometer for protein structure analysis in the beamline. The sample position for protein crystal is 3.5 m distance from X-ray source point. The short beamline results in high intensity X-ray at the sample location.

Fig. 1 MIRRORCLE RAY 20ST accommodates 4 beamlines including double crystal monochromator BL.

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MIRRORCLE RAY 20 MeV model Specifications

MIRRORCLE type:	20ST	20SX
Electrons circular machine	There is acceleration cavity
Magnet type	Electromagnet
Magnet diameter	80 cm
Electron orbit radius	15 cm
N-value	0.72
Injection method	A half integer resonance
CW Klystron power (Maximum)	10 kW
Harmonics	8
Weight	2 t
Beam lifetime (When no target, at April, 2007)	-
Injector type	MICROTRON
RF Frequency	2.45 GHz
RF Source	5 MW compact pulse klystron
Peak current (MAX)	100 mA
Injection repetition rate (MAX)	400 Hz
Timing gate width	0.1 μs
Dimensions	1.3 m O.D.
Weight	1.75 t
Energy range	Monochromatic X-ray (8 - 30 keV), FIR, EUV, Soft X-ray, Hard X-ray (10 - 20000 keV)
Irradiation area	25 mrad Φ
Maximum photon power	10 (kW)
Density (Brightness)	1010 (photons/s/mrad2/0.1% λ)
Brilliance	1014 (photons/s/mrad2/mm2/0.1% λ)
Maximum power input	200 kVA
Total size (No beamline)	W 210 x D 450 x H 143 cm	W 300 x D 600 x H 250 cm
Total size (with beamline)	It can be put into 10 m x 10 m space.	-
Total weight of 20 MeV model	3.75 t
Radiation shielding	Including Radiation Shielding. (The radiaton shielding weight is 140 t.)	Option
Control system	Automatic standby and operation. Remote monitoring and diagnosis. Emergency shutdown system.

*1 MIRRORCLE's X-ray power very much depends on the vacuum level and is expected to improve over time.

Conveniently printable specifications with all models compared can be found in the Literature & CD section of this web site.

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